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Date: 02/20/01 at 11:44 PM
Posted by: Tom
E-mail: ubeesputter@hotmail.com

im sputtering Si with DC power source at about 3~4mTorr. The plasma always shut off during the process, but the arc seems stable. If I want to keep using DC source at such vacuum level, could anybody tell me how to solve above problem?

Thanks

Tom

Follow Ups:

  Re: DC sputter Si Robert choquette   Posted at: 06/22/01 (0)

  Re: DC sputter Si Rob Belan   Posted at: 02/27/01 (0)

  Re: DC sputter Si mike plaisted   Posted at: 02/27/01 (0)

  Re: DC sputter Si U. Krause   Posted at: 02/21/01 (0)

  Re: DC sputter Si U. Krause   Posted at: 02/21/01 (0)

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