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Subject: Re: Vacuum Coating as a Hobby?

Date: 03/20/00 at 8:08 AM
Posted by: wcteng
E-mail: wcteng@yahoo.com
Message Posted:

In Reply to: Re: Vacuum Coating as a Hobby? posted by Mike Gray on 03/17/00 at 7:54 AM:

I suggest you evaporation coating instead of sputtering because a evaporation coating source is much cheaper than a sputtering one. And, it is also safer for not requiring high voltage.
You are right. You might try sputtering without a high vacuum pump like a diffusion pump. The reason is that the working pressure for sputtering is about 10 mTorr, which is higher than that required for evaporation coating. But, I do not think using plain air as a purge gas is correct. The normal working gas for metal coating is Ar, argon gas. You had better purge the chamber with Ar too. The plain air contains O2 and N2, which , if left in the chamber, will result in compound film instead of pure metal film.
If you go to the evaporation method, you will need a high vacuum pump. And, a diffusion pump is the cheapest high vacumm pump as I know.
I do have some hand on experiences in vacuum coating system assembly and coating stuff. Although it is hard for me to imagine these things as a hobby, I will be glad if I can help in your trial.


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