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Subject: Kinetics of silicon etch by bromine based plasmas

Date: 05/18/00 at 10:52 AM
Posted by: Siddhartha Panda
E-mail: spanda@us.ibm.com
Message Posted:

Hello:
I am looking for literature on the kinetics of silicon etch by bromine based plasmas.
Any help is appreciated.

Thanks,

Siddhartha


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