| Home | Terms of Use | Site Map | Contact Us |
IndustryCommunity.com > Electrical and Electronic Community > Trading Board D > Message
Main Menu
Find

[ List Topics ][ Current Board ][ Post Message ]
[ View Followups ][ Post Followup ]

Subject: LPCVD Reactors Available

Date: 12/03/01 at 4:46 PM
Posted by: Roland Levy
E-mail: levyr@njit.edu
Message Posted:

Two vertical LPCVD reactors (a Kokusai Vertex-V model DJ 815V-8L and a TEL/Varian Alpha 8S) in excellent condition and suitable for VLSI R&D/manufacturing are available for sale. Both are high throughput, load-locked, cassette-to-cassette, fully automated units capable of handling up to 8" wafers. The Kokusai is configured to deposit PolySi and silicon nitride. The TEL/Varian is configured to deposit tantalum oxide. Both can readily be used for depositing all standard LPCVD processes including silica, doped glasses, silicon nitride, Polysi, titanium silicide, titanium nitride,etc... Interested parties may contact me by return e-mail or by calling me at (973) 596-3561.

Follow Ups:


Post a Follow-up:

Name:
E-Mail:
Subject:

Message to Post:

 

1999-2001 Sunlit Technology Co., Ltd. All rights reserved.