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Subject: Comptech Sputtering System

Date: 04/19/02 at 5:06 AM
Posted by: Sgvdp@worldnet.att.net
E-mail: Sgvdp@worldnet.att.net
Message Posted:

Manufactured by Comptech. Chamber inside dimensions: 8.5" deep x 31" dia. Hydraulic hoist. Three 8" cathodes, 1 DC magnetron, two RF and one heater. Rotating substrate table. Advanced Energy RFX 1250 watt power supply (programmable functions, ramp, run, target life, etc.) with remote mini panel. Advanced Energy MDX 5KW DC power Supply. Auto tuning. Automatic pumpdown with interlock protection. VAT series 64 pressure control high vacuum gate valve with PM-5 controller. CTI-8 Onboard cryopump and 8510 compressor. Stokes roughing pump. MKS 247C four channel readout with 4 gas distribution manifolds (up to 4 MFC's). System can be upgrade it to a 10" cryo and 10 VAT valve. Some spare cathode parts and some drawings are included. E-mail me for pictures. Sgvdp@worldnet.att.net

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