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Subject: Wanted : AMAT and Novellus PECVD Technical Manuals
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Date: 06/06/03 at 4:17 PM
Posted by: David Lee
I am looking for the AMAT and Novellus PECVD technical manuals covering the AMAT Centura, Producer and P5000, Novellus C2 Dual Sequel platforms. I need the sections referring to process and the chambers, not interested in the platforms themselves, maintenance or schematics.
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