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Subject: Does anyone know a WET BOX test setup for wafers ?

Date: 04/23/02 at 5:09 AM
Posted by: Tom Claes
E-mail: tclaes@atmi.com
Message Posted:

I want to make a test setup for a wet box test for horizontal wafer boxes, to evaluate wafer corrosion and material builtup caused by wafer inserts. Is there any standard setup that I can follow? Until know I understood different companies are doing their own specific setup.
Thanks !
Tom Claes, ATMI Solids Packaging Belgium

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