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Subject: evaporatin of platinum om PMMA

Date: 09/21/99
Posted by: Motti Vered
E-mail: veredm(at)is(dot)elta(dot)co(dot)il(no spam)
URL: http://

Message:

I am looking for inputs regarding the best ways to prevent damage to electron beam resists (PMMA) during e-beam gun evaporation of platinum (Pt). What should be the best evaporation conditions and is there a need for special electron traps? Thank you in advance, Regards, Motti

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